[1]
|
Wang, M., Gu, X., Ma, P., Zhang, W., Yu, D., Chang, P. and Li, D. (2017) Microstructured Superhydrophobic An-ti-Reflection Films for Performance Improvement of Photovoltaic Devices. Materials Research Bulletin, 91, 208-213.
https://doi.org/10.1016/j.materresbull.2017.03.019
|
[2]
|
Śmigaj, W., Gralak, B., Pierre, R. and Tayeb, G. (2009) Antireflection Gratings for a Photonic-Crystal Flat Lens. Optics Letters, 34, 3532-3534. https://doi.org/10.1364/OL.34.003532
|
[3]
|
Kuang, P., Eyderman, S., Hsieh, M.L., Post, A., John, S. and Lin, S.Y. (2016) Achieving an Accurate Surface Profile of a Photonic Crystal for Near-Unity Solar Absorption in a Super Thin-Film Architecture. ACS Nano, 10, 6116-6124.
https://doi.org/10.1021/acsnano.6b01875
|
[4]
|
Syed, W.A., Rafiq, N., Ali, A., Din, R.U. and Shah, W.H. (2017) Multilayer AR Coatings of TiO2/MgF2 for Application in Optoelectronic Devices. Optik, 136, 564-572.
|
[5]
|
Miyazaki, S., Komiyama, Y., Kawanomoto, S., Doi, Y., Furusawa, H., Hamana, T. and Yokota, H. (2018) Hyper Suprime-Cam: System Design and Verification of Image Quality. Publications of the Astronomical Society of Japan, 70, S1. https://doi.org/10.1093/pasj/psx063
|
[6]
|
Liu, X., Chandrasekhar, S., Winzer, P.J., Chraplyvy, A.R., Tkach, R.W., Zhu, B. and DiGiovanni, D.J. (2012) Scrambled Coherent Superposition for En-hanced Optical Fiber Communication in the Nonlinear Transmission Regime. Optics Express, 20, 19088-19095. https://doi.org/10.1364/OE.20.019088
|
[7]
|
Haddadi, S., Yacomotti, A.M., Sagnes, I., Raineri, F., Beaudoin, G., Le Gratiet, L. and Levenson, J.A. (2013) Photonic Crystal Coupled Cavities with Increased Beaming and Free Space Coupling Efficiency. Applied Physics Letters, 102, Article ID: 011107. https://doi.org/10.1063/1.4772955
|
[8]
|
Scheller, M., Baker, C.W., Koch, S.W., Moloney, J.V. and Jones, R.J. (2017) High Power Dual-Wavelength VECSEL Based on a Multiple Folded Cavity. IEEE Photonics Technology Letters, 29, 790-793.
https://doi.org/10.1109/LPT.2017.2685595
|
[9]
|
Li, X., Gao, J., Xue, L. and Han, Y. (2010) Porous Polymer Films with Gradient‐Refractive-Index Structure for Broadband and Omnidirectional Antireflection Coatings. Ad-vanced Functional Materials, 20, 259-265.
https://doi.org/10.1002/adfm.200901052
|
[10]
|
Poxson, D.J., Kuo, M.L., Mont, F.W., Kim, Y.S., Yan, X., Welser, R.E. and Schubert, E.F. (2011) High-Performance Antireflection Coatings Utilizing Nanoporous Layers. MRS Bulletin, 36, 434-438.
https://doi.org/10.1557/mrs.2011.110
|
[11]
|
Chhajed, S., Poxson, D.J., Yan, X., Cho, J., Schubert, E.F., Welser, R.E. and Kim, J.K. (2011) Nanostructured Multilayer Tailored-Refractive-Index Antireflection Coating for Glass with Broadband and Omnidirectional Characteristics. Applied Physics Express, 4, Article ID: 052503. https://doi.org/10.1143/APEX.4.052503
|
[12]
|
Sarkar, S., Pradhan, S.K. and Jeevitha, M. (2019) Factors In-fluencing the Nanostructure of Obliquely Deposited Thin Films. Surface Engineering, 35, 227-233. https://doi.org/10.1080/02670844.2018.1458490
|
[13]
|
Lu, L., Zhang, F., Xu, Z., Zhao, S., Zhuo, Z., Song, D. and Wang, Y. (2010) Characteristics of ZnS Nanocolumn Arrays and Their Effect on the Light Outcoupling of OLEDs. Physica B: Condensed Matter, 405, 3728-3731.
https://doi.org/10.1016/j.physb.2010.05.075
|
[14]
|
Zhu, H., Cao, W., Larsen, G.K., Toole, R. and Zhao, Y. (2012) Tilting Angle of Nanocolumnar Films Fabricated by Oblique Angle Deposition. Journal of Vacuum Science & Technology B, 30, Article ID: 030606.
https://doi.org/10.1116/1.4710999
|
[15]
|
Alvarez, R., Lopez-Santos, C., Parra-Barranco, J., Rico, V., Barranco, A., Cotrino, J. and Palmero, A. (2014) Nanocolumnar Growth of Thin Films Deposited at Oblique Angles: Beyond the Tangent Rule. Journal of Vacuum Science & Technology B, 32, Article ID: 041802. https://doi.org/10.1116/1.4882877
|
[16]
|
Álvarez Molina, R., García Valenzuela, A., García-Martín, J.M., Co-trino Bautista, J., Rodríguez González-Elipe, A. and Palmero Acebedo, A. (2019) Kinetic Energy-Induced Growth Regimes of Nanocolumnar Ti Thin Films Deposited by Evaporation and Magnetron Sputtering. Nanotechnology, 30, Article ID: 475603.
https://doi.org/10.1088/1361-6528/ab3cb2
|
[17]
|
Siad, A., Besnard, A., Nouveau, C. and Jacquet, P. (2016) Critical Angles in DC Magnetron Glad Thin Films. Vacuum, 131, 305-311. https://doi.org/10.1016/j.vacuum.2016.07.012
|
[18]
|
Mes-adi, H., Saadouni, K. and Mazroui, M. (2021) Effect of Incident Angle on the Microstructure Proprieties of Cu Thin Film Deposited on Si (001) Substrate. Thin Solid Films, 721, Article ID: 138553.
https://doi.org/10.1016/j.tsf.2021.138553
|
[19]
|
Zhao, Y., He, Y. and Brown, C. (2012) Composition Dependent Nanocolumn Tilting Angle during the Oblique Angle Co-Deposition. Applied Physics Letters, 100, Article ID: 033106. https://doi.org/10.1063/1.3676665
|
[20]
|
Larson, S., Huang, W. and Zhao, Y. (2016) Combinatorial Fabrication of Composite Nanorods Using Oblique Angle Co-Deposition. Nanotechnology, 27, Article ID: 365304. https://doi.org/10.1088/0957-4484/27/36/365304
|
[21]
|
Guo, X., Quan, X., Li, Z., Li, Q., Zhang, B., Zhang, X. and Song, C. (2021) Broadband Anti-Reflection Coatings Fabricated by Precise Time-Controlled and Oblique-Angle Deposition Methods. Coatings, 11, Article No. 492.
https://doi.org/10.3390/coatings11050492
|
[22]
|
Lv, Q.P., Deng, S.W., Zhang, S.Q., Gong, F.Q. and Li, G. (2017) Fabrication of Broadband Antireflection Coatings Using Broadband Optical Monitoring Mixed with Time Monitoring. Chinese Physics B, 26, Article ID: 057801.
https://doi.org/10.1088/1674-1056/26/5/057801
|
[23]
|
Sun, P., Hu, M., Zhang, F., Ji, Y.Q., Liu, H.S., Liu, D.D. and Leng, J. (2015) Effects of the Ion-Beam Voltage on the Properties of the Diamond-Like Carbon Thin Film Prepared by Ion-Beam Sputtering Deposition. Chinese Physics B, 24, Article ID: 067803. https://doi.org/10.1088/1674-1056/24/6/067803
|
[24]
|
Khan, S.B., Wu, H. and Zhang, Z. (2018) Omnidirec-tional SiO2 AR Coatings. Coatings, 8, Article No. 210.
https://doi.org/10.3390/coatings8060210
|
[25]
|
Sarakinos, K., Alami, J. and Konstantinidis, S. (2010) High Power Pulsed Magnetron Sputtering: A Review on Scientific and Engineering State of the Art. Surface and Coatings Technology, 204, 1661-1684.
https://doi.org/10.1016/j.surfcoat.2009.11.013
|
[26]
|
Yi, K., Liu, D., Chen, X., Yang, J., Wei, D., Liu, Y. and Wei, D. (2021) Plasma-Enhanced Chemical Vapor Deposition of Two-Dimensional Materials for Applications. Accounts of Chemical Research, 54, 1011-1022.
https://doi.org/10.1021/acs.accounts.0c00757
|
[27]
|
Gholizadeh, M., Moghadam, R.Z., Mohammadi, A.A., Ehsani, M.H. and Dizaji, H.R. (2020) Design and Fabrication of MgF2 Single-Layer Antireflection Coating by Glancing Angle Deposition. Materials Research Innovations, 24, 442-446.
https://doi.org/10.1080/14328917.2020.1723991
|
[28]
|
Sood, A.K., Zeller, J.W., Sood, A.W., Welser, R.E., Ghuman, P., Babu, S. and Efstathiadis, H. (2021) Development of Nanostructured Antireflection Coating Tech-nology for IR Band for Improved Detector Performance. Sensors, Systems, and Next-Generation Satellites XXV, 11858, Article ID: 1185812. https://doi.org/10.1117/12.2598994
|
[29]
|
Prachachet, R., Samransuksamer, B., Horprathum, M., Eiamchai, P., Limwichean, S., Chananonnawathorn, C. and Buranasiri, P. (2018) A Comparative Study on Omnidirectional Anti-Reflection SiO2 Nanostructure Films Coating by Glancing Angle Deposition. Ox-ide-Based Materials and Devices IX, 10533, 261-267.
https://doi.org/10.1117/12.2290056
|
[30]
|
Feng, C., Zhang, W., Wang, J., Ma, H., Liu, S., Yi, K. and Shao, J. (2021) Broadband Antireflection Film by Glancing Angle Deposition. Optical Materials, 111, Article ID: 110720. https://doi.org/10.1016/j.optmat.2020.110720
|
[31]
|
Saint-André, S., Rodríguez, D., Perillo, P. and Barrera, M. (2021) TiO2 Nanotubes Antireflection Coating Design for GaAs Solar Cells. Solar Energy Materials and Solar Cells, 230, Article ID: 111201.
https://doi.org/10.1016/j.solmat.2021.111201
|
[32]
|
Ordouie, E., Alisafaee, H. and Siahmakoun, A. (2018) Ul-tracompact Polarizing Beam Splitter Based on Single-Material Birefringent Photonic Crystal. Optics Letters, 43, 4288-4291. https://doi.org/10.1364/OL.43.004288
|
[33]
|
Kelly, P.J. and Arnell, R.D. (2000) Magnetron Sput-tering: A Review of Recent Developments and Applications. Vacuum, 56, 159-172. https://doi.org/10.1016/S0042-207X(99)00189-X
|
[34]
|
Alvarez, R., Garcia‐Valenzuela, A., Lopez‐Santos, C., Ferrer, F.J., Rico, V., Guillen, E. and Palmero, A. (2016) High‐Rate Deposition of Stoichiometric Compounds by Reactive Magnetron Sputtering at Oblique Angles. Plasma Processes and Polymers, 13, 960-964. https://doi.org/10.1002/ppap.201600019
|
[35]
|
Sorge, J.B., Taschuk, M.T., Wakefield, N.G., Sit, J.C. and Brett, M.J. (2012) Metal Oxide Morphology in Argon-Assisted Glancing Angle Deposition. Journal of Vacuum Science & Technology A, 30, Article ID: 021507.
https://doi.org/10.1116/1.3687204
|
[36]
|
Kumar, V., Singh, S.K., Sharma, H., Kumar, S., Banerjee, M.K. and Vij, A. (2019) Investigation of Structural and Optical Properties of ZnO Thin Films of Different Thickness Grown by Pulsed Laser Deposition Method. Physica B: Condensed Matter, 552, 221-226. https://doi.org/10.1016/j.physb.2018.10.004
|
[37]
|
Martinu, L., Zabeida, O. and Klemberg-Sapieha, J.E. (2010) Plasma-Enhanced Chemical Vapor Deposition of Functional Coatings. In: Martin, P.M., Ed., Handbook of Deposi-tion Technologies for Films and Coatings, Elsevier, Amsterdam, 392-465. https://doi.org/10.1016/B978-0-8155-2031-3.00009-0
|
[38]
|
Gupta, A., Cheng, H.Y., Lin, K.H., Wu, C.T., Roy, P.K., Ghosh, S. and Chattopadhyay, S. (2019) Gold Coated Cicada Wings: Anti-Reflective Micro-Environment for Plasmonic Enhancement of Fluorescence from Upconversion Nanoparticles. Materials Science and Engineering: C, 102, 569-577. https://doi.org/10.1016/j.msec.2019.04.080
|
[39]
|
Siddique, R.H., Gomard, G. and Hölscher, H. (2015) The Role of Random Nanostructures for the Omnidirectional Anti-Reflection Properties of the Glasswing Butterfly. Nature Communications, 6, Article No. 6909.
https://doi.org/10.1038/ncomms7909
|
[40]
|
Yao, T.F., Wu, P.H., Wu, T.M., Cheng, C.W. and Yang, S.Y. (2011) Fabrication of Anti-Reflective Structures Using Hot Embossing with a Stainless Steel Template Irradiated by Femtosecond Laser. Microelectronic Engineering, 88, 2908-2912. https://doi.org/10.1016/j.mee.2011.03.023
|
[41]
|
Altissimo, M. (2010) E-Beam Lithography for Mi-cro-/Nanofabrication. Biomicrofluidics, 4, Article ID: 026503.
https://doi.org/10.1063/1.3437589
|
[42]
|
Lu, C. and Lipson, R.H. (2010) Interference Lithography: A Powerful Tool for Fabricating Periodic Structures. Laser & Photonics Reviews, 4, 568-580. https://doi.org/10.1002/lpor.200810061
|
[43]
|
Okabe, T., Yano, T., Yatagawa, K. and Taniguchi, J. (2021) Polyimide Moth-Eye Nanostructures Formed by Oxygen Ion Beam Etching for Anti-Reflection Layers. Microelec-tronic Engineering, 242, Article ID: 111559.
https://doi.org/10.1016/j.mee.2021.111559
|
[44]
|
Li, Y., Zhang, J. and Yang, B. (2010) Antireflective Surfaces Based on Biomimetic Nanopillared Arrays. Nano Today, 5, 117-127. https://doi.org/10.1016/j.nantod.2010.03.001
|
[45]
|
Zhu, J., Yu, Z., Burkhard, G.F., Hsu, C.M., Connor, S.T., Xu, Y. and Cui, Y. (2009) Optical Absorption Enhancement in Amorphous Silicon Nanowire and Nanocone Arrays. Nano Letters, 9, 279-282. https://doi.org/10.1021/nl802886y
|
[46]
|
Leem, J.W., Guan, X.Y., Choi, M. and Yu, J.S. (2015) Broadband and Omnidirectional Highly-Transparent Coverglasses Coated with Biomimetic Moth-Eye Nanopatterned Polymer Films for Solar Photovoltaic System Applications. Solar Energy Materials and Solar Cells, 134, 45-53. https://doi.org/10.1016/j.solmat.2014.11.025
|
[47]
|
Youtsey, C., Adesida, I. and Bulman, G. (1997) Highly Anisotropic Photoenhanced Wet Etching of n-Type GaN. Applied Physics Letters, 71, 2151-2153. https://doi.org/10.1063/1.119365
|
[48]
|
Cai, J. and Qi, L. (2015) Recent Advances in Antireflective Surfaces Based on Nanostructure Arrays. Materials Horizons, 2, 37-53. https://doi.org/10.1039/C4MH00140K
|
[49]
|
Beganskiene, A., Sakirzanovas, S., Kazadojev, I., Melninkaitis, A., Sirutkaitis, V. and Kareiva, A. (2007) Sol-Gel Derived Antireflective Coating with Controlled Thickness and Re-flective Index. Materials Science-Poland, 25, 817-824.
|
[50]
|
Prado, R., Beobide, G., Marcaide, A., Goikoetxea, J. and Aranzabe, A. (2010) Development of Multifunctional Sol-Gel Coatings: Anti-Reflection Coatings with En-hanced Self-Cleaning Capacity. Solar Energy Materials and Solar Cells, 94, 1081-1088. https://doi.org/10.1016/j.solmat.2010.02.031
|
[51]
|
Liu, L.Q., Wang, X.L., Zhang, S.G., Zhang, G.Y., Dou, S.X. and Wang, G. (2012) Broadband and Omnidirectional, Nearly Zero Reflective Photovoltaic Glass. Advanced Ma-terials, 24, 6318-6322.
https://doi.org/10.1002/adma.201201740
|
[52]
|
Yan, H., Liu, T., Yang, K., Huang, B., Zhou, G., Jiang, X. and Yan, L. (2020) Nanoscale Etching of Microporous Coatings for Broadband Antireflection Coatings. Thin Solid Films, 698, Article ID: 137858.
https://doi.org/10.1016/j.tsf.2020.137858
|
[53]
|
Schulz, U. (2009) Wideband Antireflection Coatings by Com-bining Interference Multilayers with Structured Top Layers. Optics Express, 17, 8704-8708. https://doi.org/10.1364/OE.17.008704
|
[54]
|
Bruynooghe, S., Schulze, M., Helgert, M., Challier, M., Tonova, D., Sundermann, M. and Kley, E.B. (2016) Broadband and Wide-Angle Hybrid Antireflection Coatings Prepared by Combining Interference Multilayers with Subwavelength Structures. Journal of Nanophotonics, 10, Article ID: 033002. https://doi.org/10.1117/1.JNP.10.033002
|
[55]
|
Pfeiffer, K., Ghazaryan, L., Schulz, U. and Szeghalmi, A. (2019) Wide-Angle Broadband Antireflection Coatings Prepared by Atomic Layer Deposition. ACS Applied Materials & Interfaces, 11, 21887-21894.
https://doi.org/10.1021/acsami.9b03125
|
[56]
|
Jones, F.L. and Homer, H.J. (1941) Chemical Methods for In-creasing the Transparency of Glass Surfaces. JOSA, 31, 34-37. https://doi.org/10.1364/JOSA.31.000034
|