数字全息显微测量再现算法比较研究
Comparison Research on Reconstruction Algorithms of Digital Holographic Microscopy Measurement
摘要: 数字全息显微测量技术是结合光学全息术、计算机技术以及光电成像技术并且逐渐发展而来的一种全新的成像技术，通过计算机处理得到三维结构及其各个测量指标的一种测量检测方式，是检测显微样本微观结构的重要方法，能够测量出所需要的各项观测指标。文中采用菲涅耳近似再现算法与卷积再现算法实现了数字全息图的再现，通过对微器件进行检测，验证了该方法用于微器件几何参数测量的可行性和有效性。
Abstract:
Digital holography microscopy technique is combined with optical holography computer techno- logy and photoelectric imaging technique and the gradual development of a new imaging techno- logy, the three-dimensional structure and the measurement of each indicator of a measurement method, is the detection of microscopic samples of the important methods, can measure the needs of the various observational indicators. In this paper, Fresnel approximation algorithm and convolution reproduction algorithm are used to reproduce the digital hologram, which verifies the feasibility and validity of the method used in the measurement of micro-device geometric parameters by detecting the micro-devices.
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