基本情况

梁金星，工学博士，东南大学仪器科学与工程学院副教授、硕士生导师。


研究领域

石英微加工技术、高灵敏高品质力频石英MEMS振梁谐振器、高灵敏小型化石英振梁加速度传感器、高频小型化石英晶体微天平、基于流动注射技术的生物MEMS传感器


教育背景

2008年9月 博士，日本早稻田大学

2004年3月 硕士，日本九州大学

1998年7月 学士，中国矿业大学


论文发表

  1. Jinxing Liang, Xuefeng Li, Hongsheng Li, Yunfang Ni, Kunyu Li, Libin Huang, Toshitsugu Ueda. Japanese Journal of Applied Physics, Volume 50, Issue 6, pp. 06GM06-06GM06-4 (2011). (SCI/EI)
  2. Xuefeng Li, Jinxing Liang, Yury Zimin, Yupeng Zhang, Shuo Lin, and Toshitsugu Ueda. U-Band Wavelength References Based on Photonic Bandgap Fiber Technology. Journal of Lightwave Technology, Vol. 29, Issue 19, pp. 2934-2939 (2011) (SCI)
  3. Xuefeng Li, Pawlat J., Jinxing Liang, and Ueda, T. Measurement of Low Gas Concentrations Using Photonic Bandgap Fiber Cell. IEEE Sensors Journal Volume: 10 Issue: 6 pp. 1156-1161 (2010)
  4. Jinxing Liang, Toshitsugu Ueda. Improved MEMS structure for stress-free flip-chip packaging. Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 8, 021118, 2009
  5. Jinxing Liang, Kohsaka Fusao, Takahiro Matsuo, Xuefeng Li, Ken Kunitomo, and Toshitsugu Ueda. “Development of Highly Integrated Quartz Micro Electro Mechanical System Tilt Sensor”, Japanese Journal of Applied Physics, Vol. 48 (2009) 06FK10
  6. Jinxing Liang, Fusao Kohsaka, Xuefeng Li, Kunitomo, K., Ueda, T.; Characterization of a quarts MEMS tilt sensor with 0.001º precision. TRANSDUCERS 2009. International Solid-State Sensors, Actuators and Microsystems Conference, June , 2009. Denver, USA. p. 308-310
  7. Jinxing Liang, Fusao Kohsaka, Takahiro Matsuo, Xuefeng Li and Toshitsugu Ueda. Improved bi-layer lift-off process for MEMS applications. Microelectronic Engineering, Vol. 85, No. 5-6, pp. 1000-1103
  8. Jinxing Liang, Takahiro Matsuo, Fusao Kohsaka, Xuefeng Li, Ken Kunitomo and Toshitsugu Ueda Fabrication of Two-Axis Quartz MEMS-Based Capacitive Tilt Sensor. IEEJ Transactions on Sensors and Micromachines. Vol. 128 (2008) , No. 3 pp. 85-90
  9. Jinxing Liang, Fusao Kohsaka, Takahiro Matsuo, Toshitsugu Ueda. Wet etched high aspect ratio microstructures on quartz for MEMS applications. IEEJ Transactions on Sensors and Micromachines, Vol. 127, No. 7, pp 337-342, 2007
  10. Kohsaka Fusao, Liang Jinxing, Matsuo Takahiro, Ueda Toshitsugu High Sensitive Tilt Sensor for Quartz Micromachining. IEEJ Transactions on Sensors and Micromachines, Volume 127, Issue 10, pp. 431-436 (2007)
  11. Liang Jinxing, Kohsaka Fusao, Matsuo Takahiro, and Ueda, Toshitsugu A novel lift off process and its application for capacitive tilt sensor. Proceedings of IEEE Sensors, pp. 1422-1425, 2006